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0020 81665 PartversusPfeiffer TPU 100 Turbomolecular Vacuum

Applied Materials 0020 81665 Part, Balzers Pfeiffer TPU 100 Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0020 81665 PartApplied Materials
OEMApplied MaterialsBalzers
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 81665 PartBalzers Pfeiffer TPU
Specifications
ConfigurationGuide, Fiber Mount, Ude, Lk[1]—
Pumping Speed—110 l/s[2]
Pump type—Turbomolecular vacuum pump[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com