Balzers
Pfeiffer TPU 100 Turbomolecular Vacuum
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Balzers Pfeiffer TPU 100 is a turbomolecular vacuum pump. The TPU 100 has a pumping speed of 110 l/s.[1]
What it is
How it works
General reference — not yet source-verifiedA turbomolecular vacuum pump is a high-vacuum pump that removes gas from a chamber by transferring momentum from rapidly rotating elements to gas molecules. A turbomolecular vacuum pump normally operates as part of a vacuum system that also includes a backing pump, because the turbomolecular stage is used to sustain high vacuum rather than begin from atmospheric pressure. A turbomolecular vacuum pump is typically installed between a process chamber and the roughing side of the vacuum train, where it supports low-pressure operation for equipment that depends on clean gas handling.
Where it fits in the process flow
General reference — not yet source-verifiedA turbomolecular vacuum pump belongs to lab and support equipment that serves vacuum-dependent tools rather than performing patterning, deposition, or etch by itself. A turbomolecular vacuum pump is commonly integrated with analytical instruments, load locks, transfer chambers, and process chambers that require stable high vacuum. A turbomolecular vacuum pump therefore fits around the supporting vacuum infrastructure of a fab or laboratory environment.
Applications
The Balzers Pfeiffer TPU 100 is used in high- and ultrahigh-vacuum applications.[2]
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of equipment is the Balzers Pfeiffer TPU 100?
The Balzers Pfeiffer TPU 100 is a turbomolecular vacuum pump.[2][1]
What is the pumping speed of the Balzers Pfeiffer TPU 100?
The pumping speed of the Balzers Pfeiffer TPU 100 is 110 l/s.[2][1]
What vacuum regime is the Balzers Pfeiffer TPU 100 used for?
The Balzers Pfeiffer TPU 100 is used in high- and ultrahigh-vacuum applications.[2]
Not publicly documented
The following facts about the Pfeiffer TPU 100 Turbomolecular Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the Pfeiffer TPU 100 Turbomolecular Vacuum are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Pfeiffer TPU 100 Turbomolecular Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Pfeiffer TPU 100 Turbomolecular Vacuum are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Pfeiffer TPU 100 Turbomolecular Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Pfeiffer TPU 100 Turbomolecular Vacuum are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 17, 2026.
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