Waferpedia

Comparison ledger

0041-26723 Bonded Assemblyversus850 LT SOI Fusion Wafer

Applied Materials 0041-26723 Bonded Assembly, EV Group 850 LT SOI Fusion Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size—200mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0041-26723 Bonded AssemblyEV Group 850
Specifications
Configuration—Fully-Automatic[1]
Wafer size—Suitable for wafer sizes up to 8"/200mm wafers[1]
OEM—EV Group[2]
Model—850 LT SOI Fusion Wafer[1]
Category—Packaging & Bonding[2]
Automation—Fully-automatic[2]
Cleaning module—One Cleaning Module[1]
Spinner chuck—One Spinner Chuck for 8”/200mm wafers[1]
DI water dispense line—One DI Water Dispense Line[1]
Robot / pre-aligner—One Genmark Robot with pre-aligner[1]
Low-temperature plasma activation module—One LowTemp Plasma Activation Module[1]
High-frequency RF generator—High Frequency RF Generator with Matching Unit[1]
Low-frequency RF generator—Low Frequency RF Generator with Matching Unit[1]
Control interface—PC controlled with windows based graphical user interface[1]
Access control—Password protected access levels[1]
Cleaning speed—Programmable rotational speed for substrate cleaning[1]
Configured wafer size—8-inch/200mm wafers[1]
Plasma activation module—One LowTemp Plasma Activation Module[1]

Plan your fab

Building a Packaging & Bonding process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com