Waferpedia

EV Group

850 LT SOI Fusion Wafer

Packaging & Bonding200mmEV Group 850 family
Research Quality: 20% complete
EV Group850 LT SOI Fusion Wafer
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What is it?

The EV Group 850 LT SOI Fusion Wafer Bonder is a fully automatic wafer bonder configured for 8-inch/200mm wafers.

What do the numbers mean?

Power & electrical2

High Frequency RF Generator with Matching Unit[1]
Accurate?
Low Frequency RF Generator with Matching Unit[1]
Accurate?

Wafer handling5

Wafer size
Suitable for wafer sizes up to 8"/200mm wafers[1]
Accurate?
Currently configured for 8"/200mm wafers[1]
Accurate?
One Spinner Chuck for 8”/200mm wafers[1]
Accurate?
One Genmark Robot with pre-aligner[1]
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Programmable rotational speed for substrate cleaning[1]
Accurate?

Control & software1

PC controlled with windows based graphical user interface[1]
Accurate?

Configuration & options5

Fully-Automatic[1]
Accurate?
One Cleaning Module[1]
Accurate?
One DI Water Dispense Line[1]
Accurate?
One LowTemp Plasma Activation Module[1]
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Password protected access levels[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationHigh Frequency RF Generator with Matching Unit[1]
  • ConfigurationLow Frequency RF Generator with Matching Unit[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 850 LT SOI Fusion Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 850 LT SOI Fusion Wafer are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 850 LT SOI Fusion Wafer are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 850 LT SOI Fusion Wafer are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 850 LT SOI Fusion Wafer are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 850 LT SOI Fusion Wafer is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing
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Last updated Jul 29, 2026.

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