Comparison ledger
Applied Materials 0041-39086 ESC Part, Lam Research TCP 9400 SE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0041-39086 ESC PartApplied Materials | TCP 9400 SELam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Lam Research TCP 9400 SE |
| Cited variants | — | |
| Specifications | ||
| Software Revision | — | E1.6.1-002[3] |
| Main UI PN | — | PC NEXT 33[3] |
| ESC | — | 718-094523-281[3] |
| Liner | — | 715-030329-002[3] |
| GAZ Box Réf | — | 853-024403-104[3] |
| Platform | — | Rainbow[4] |
| Source type | — | Inductively coupled (TCP)[4] |
| Wafer size | — | 200 mm (8 inch)[3] |
| Chamber configuration | — | Single chamber[4] |
| Wafer transport | — | Cassette to cassette[4] |
| Vacuum pump | — | Leybold TURBOVAC 1000C[1] |
| Software version | — | Envision version 1.4[1] |
| End point detection | — | Emission and interferometric[4] |
| Ceramic free chamber | — | Yes[1] |
| Waferless auto clean (WAC) | — | Yes[1] |
| CE Certified | — | Yes[1] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →