Lam Research
TCP 9400 SE
The Lam Research TCP 9400 SE is an inductively coupled plasma etcher on the Rainbow platform. The TCP 9400 SE processes 200 mm wafers in a cassette-to-cassette configuration. The TCP 9400 SE is used for polysilicon/polycide etch and shallow trench isolation.[1][2]
What it is
The Lam Research TCP 9400 SE is an etch system used in semiconductor manufacturing.[5][3][1][2][6][4]
The TCP 9400 SE is built on Lam Research's Rainbow platform.[1][2]
The system uses a Transformer Coupled Plasma (TCP) inductively coupled source.[1][2]
Wafer sizes supported include 150 mm and 200 mm (8 inch).[3][2][6][4]
How it works
The TCP 9400 SE is a single-chamber, cassette-to-cassette system.[1][2]
The system employs a ceramic-free chamber with waferless auto clean (WAC) capability.[2]
Vacuum is provided by a Leybold TURBOVAC 1000C turbo-molecular pump or an Edwards 1303 turbo pump.[2][4]
The system is controlled by Envision software version 1.4 or revision E1.6.1-002.[3][2]
Where it fits in the process flow
Applications
What do the numbers mean?
Vacuum & pumping1
Wafer handling3
Control & software3
Configuration & options9
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 9400 SE (Model 9408) | — | 1996 | Model 9408 variant with serial number 4055, vintage 1996, Envision software version 1.4. | photonicmicrodevices.com[2] |
| TCP 9400 SE (150 mm configuration) | — | — | Machine configured for 150 mm wafers, with Edwards 1303 turbo pump, 8-gas orbital gas box, RFG 1250 Halo and RFDS generators. | wotol.com[4] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Vacuum pumpLeybold TURBOVAC 1000C[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the TCP 9400 SE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TCP 9400 SE are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the TCP 9400 SE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TCP 9400 SE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TCP 9400 SE is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the TCP 9400 SE are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]photonicmicrodevices.com — photonicmicrodevices.comphotonicmicrodevices.com
- [2]photonicmicrodevices.com — photonicmicrodevices.comphotonicmicrodevices.com
- [3]Inventory photo
- [4]wotol.com — wotol.comwotol.com
- [5]Equipment inventory listing
- [6]http://www.gtc.tw/TLLC10131.TCP4F01%20LAM%209400.pdf — gtc.twgtc.tw
Last updated Aug 25, 2026.