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0242-36515 RTP XE Chamber Temperature Match KitversusA 400

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, ASM A 400, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0242-36515 RTP XE Chamber Temperature Match KitApplied Materials
A 400ASM
OEMApplied MaterialsASM
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—ASM A 400
Cited variants—
  • A400 (Wet Ox / Wet O)[1]
  • A400 (TEOS / Nitride)[2]
  • A400 (Poly / Nitride)[3]
  • A400 (BPSG)[4]
Specifications
Configuration—Wet Ox / Wet O[1]
Vintage—2008
Furnaces / Diffusion Vintage—2008
Wafer Size—8 inch (200 mm)[1]
Process Capabilities—Oxidation/Diffusion, LPCVD, ALD[5]
Configured Processes (sourced listings)—Wet Ox/Wet O, TEOS/Nitride, Poly/Nitride, BPSG[1]
Processes—Oxidation, Diffusion, LPCVD, ALD[5]
Type—Batch Vertical Furnace[5]
Model—A 400[1]
Product type—Batch vertical furnace[5]
0242-36515 RTP XE Chamber Temperature Match Kit entryA 400 entryAsk about these tools →Share experience with this comparison →

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]web.archive.orgweb.archive.org