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ASM

A 400

Thermal / DiffusionASM A 400 family
Research Quality: 20% complete
ASMA 400
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What is it?

The ASM A 400 Furnace is an 8-inch furnace configured for poly/nitride processing.

What do the numbers mean?

Configuration & options4

Wet Ox / Wet O[1]
Accurate?
TEOS / Nitride[2]
Accurate?
Poly / Nitride[3]
Accurate?
BPSG[4]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the A 400 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the A 400 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the A 400 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the A 400 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the A 400 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the A 400 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]Markets & productsasm.com (Dec 7, 2021)web.archive.org
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Last updated Jul 29, 2026.

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