Comparison ledger
Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Brewer Science 11 Bake Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0242-36515 RTP XE Chamber Temperature Match KitApplied Materials | 11 Bake PlateBrewer Science |
|---|---|---|
| OEM | Applied Materials | Brewer Science |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Brewer Science 11 Bake Plate |
| Specifications | ||
| P/N | — | 901696[1] |
| Manufacturer | — | Brewer Science[1] |
| Model | — | 11[1] |
| Machine Weight | — | 150 lb[2] |
| Shipping Weight | — | 280 lb[2] |
| Cabinet Dimensions | — | 28.25 in L x 28.25 in W x 9.5 in H[2] |
| Temperature Resolution | — | 0.1°C[2] |
| Temperature Range | — | ambient to 200°C (250°C optional)[2] |
| Temperature Uniformity | — | ± 0.3% across working surface[2] |
| Power Requirements | — | 208 to 240 volts AC, 2351-3130 watts[2] |
| Full Load Current | — | 12.5 to 15.5 amps[2] |
| Input Breaker/Fuse | — | 20 amps[2] |
| Substrate Sizes | — | < 1 cm to 450-mm round; 20 in x 20 in square[2] |
| Make | — | Brewer Science[1] |
| Display | — | Dual 4-digit alphanumeric LED display[2] |
| Control | — | Full PID operation[2] |
| Temperature auto-tuning | — | Capable[2] |
| Security | — | Password protection option at no charge[2] |
| Ramping capability | — | Optional; 8 specific set points[2] |
| Lift pins | — | Pneumatic lift pins (load/unload) standard[2] |
| Standoffs | — | Removable fixed proximity standoffs (0.006 in standard)[2] |
| Bake methods | — | Contact or fixed proximity bake methods (standard)[2] |
| Optional bake modes | — | Optional vacuum and proximity bake for 300-mm and 450-mm wafers[2] |
| Custom surfaces | — | Optional custom bake plate surfaces available upon request[2] |
| Optional exhausted lid port | — | 2-inch OD[2] |
| Optional exhausted lid | — | 10- to 30-cfm range[2] |
| Optional exhausted hood | — | All stainless steel construction[2] |
| Optional nitrogen purge | — | For inert bake environment[2] |
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