Brewer Science
11 Bake Plate
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Brewer Science 11 Bake Plate is a bake plate. The Brewer Science 11 Bake Plate is designed for large-area 450-mm-diameter substrates and 20-in-square panels. The Brewer Science 11 Bake Plate provides temperature range from ambient to 200°C, with 250°C optional.[1]
Power
208 to 240 volts AC, 2351-3130 watts[1]
Vacuum
2-inch OD[1]
Performance
± 0.3% across working surface[1]
Optics
0.1°C[1]
What it is
General reference — not yet source-verifiedBake plates are thermal processing tools used to heat substrates on a controlled hot surface. Bake plates are commonly used in microfabrication and related panel processes when a step requires controlled solvent removal, film drying, soft bake, hard bake, or other temperature-conditioned treatment between coating, exposure, develop, or curing operations.
How it works
The Brewer Science Cee Model 11 bake plate uses full PID operation and is temperature auto-tuning capable. The Brewer Science Cee Model 11 bake plate has a dual 4-digit alphanumeric LED display. The Brewer Science Cee Model 11 bake plate includes pneumatic lift pins for load and unload as a standard feature. The Brewer Science Cee Model 11 bake plate includes removable fixed proximity standoffs with a standard height of 0.006 in. The Brewer Science Cee Model 11 bake plate offers optional ramping with 8 specific set points. The Brewer Science Cee Model 11 bake plate offers optional vacuum and proximity bake for 300 mm and 450 mm wafers. The Brewer Science Cee Model 11 bake plate offers optional custom bake plate surfaces.[1]
The Brewer Science Cee Model 11 bake plate has a temperature resolution of 0.1 °C. The Brewer Science Cee Model 11 bake plate has a temperature range from ambient to 200 °C, with an optional 250 °C configuration. The Brewer Science Cee Model 11 bake plate specifies temperature uniformity of ±0.3% across the working surface.[1]
Where it fits in the process flow
General reference — not yet source-verifiedBake plates are used at thermal hold points within a process flow rather than as deposition, etch, or metrology tools. Bake plates commonly sit after coating steps to drive off solvent, after develop steps to stabilize patterned films, or around material treatment steps that need controlled heating before the substrate moves to the next module.
Applications
The Brewer Science Cee Model 11 bake plate is specifically designed for large-area 450 mm diameter substrates and for FPD or LCD panels up to 20 in square. The Brewer Science Cee Model 11 bake plate is intended for process and research and development engineers. The Brewer Science Cee Model 11 bake plate offers an optional exhausted hood for removal of process chemicals and an optional nitrogen purge for an inert bake environment.[1]
What do the numbers mean?
Power & electrical3
Vacuum & pumping5
Wafer handling1
Optics & imaging1
Performance1
Control & software1
Dimensions & facilities3
Configuration & options14
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Power Requirements208 to 240 volts AC, 2351-3130 watts[1]
- Full Load Current12.5 to 15.5 amps[1]
- Input Breaker/Fuse20 amps[1]
- Optional bake modesOptional vacuum and proximity bake for 300-mm and 450-mm wafers[1]
- Optional exhausted lid port2-inch OD[1]
- Optional exhausted lid10- to 30-cfm range[1]
- Optional exhausted hoodAll stainless steel construction[1]
- Optional exhausted hoodOptional exhausted hood for removal of process chemicals[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the part number for the Brewer Science 11 Bake Plate?
The part number is 901696.[2]
What is the temperature range of the Model 11 bake plate?
The standard temperature range is ambient to 200 °C, with an optional range up to 250 °C.[1]
What is the temperature uniformity specification?
The temperature uniformity is ±0.3% across the working surface.[1]
Does the Model 11 bake plate include pneumatic lift pins?
Yes, pneumatic lift pins for loading and unloading are standard.[1]
Not publicly documented
The following facts about the 11 Bake Plate are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 11 Bake Plate are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 11 Bake Plate are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 11 Bake Plate are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 11 Bake Plate are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 11 Bake Plate is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]brewerscience.com — brewerscience.combrewerscience.com
- [2]inventory listing
Last updated Oct 15, 2026.
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