Comparison ledger
Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Heller 1810 MK III IR, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0242-36515 RTP XE Chamber Temperature Match KitApplied Materials | 1810 MK III IRHeller |
|---|---|---|
| OEM | Applied Materials | Heller |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Heller 1810 |
| Specifications | ||
| Configuration | — | 18” On Load Conveyor and 18” Off Load Conveyor[1] |
| Temperature | — | 20 Independent Temperature Controlled 350°C IR Heating Zones[1] |
| Voltage | — | 480V, 50/60 HZ, 3 phase, 100 AMPS per phase · Left to Right Conveyor Travel[1] |
| Floor space requirements | — | 183"L x 54"W x 63"H[1] |
| Equipment type | — | IR Cure Oven[1] |
| On-load conveyor width | — | 18 in[1] |
| Off-load conveyor width | — | 18 in[1] |
| Heated tunnel length | — | 130 in[1] |
| Heating zones | — | 20 independent temperature controlled 350°C IR heating zones[1] |
| Temperature control | — | PID temperature control[1] |
| Temperature stability | — | +/- 1°C[1] |
| Power | — | 480V, 50/60 Hz, 3 phase, 100 AMPS per phase[1] |
| Conveyor travel | — | Left to right[1] |
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