Comparison ledger
Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Mattson SHS 2800 RTA, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0242-36515 RTP XE Chamber Temperature Match KitApplied Materials | SHS 2800 RTAMattson |
|---|---|---|
| OEM | Applied Materials | Mattson |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Mattson SHS 2800 RTA |
| Specifications | ||
| Configuration | — | Front End[1] |
| Process | — | Oxid (BPSG + RTP)[1] |
| Voltage | — | 380 V, 63.0 A, 50/60 Hz, 3 Phase[1] |
| Make | — | Mattson[1] |
| Model | — | SHS 2800[3] |
| Category | — | Thermal / Diffusion[3] |
| Type | — | rapid thermal anneal system[3] |
| Temperature measurement | — | Ripple Pyrometer[1] |
| Cooling | — | Jet Venturi System[1] |
| Electrical | — | 380 V, 63.0 A, 50/60 Hz, 3 Phase[1] |
| Vintage | — | 2000[1] |
| Manufacturer | — | Mattson[3] |
| Control configuration | — | Front End; tool-controller configurations[3] |
| Control software | — | Win7 (Updated 2018) / Win7 (Updated 2019)[3] |
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