Mattson

SHS 2800 RTA

Thermal / Diffusion Mattson SHS 2800 RTA family

Research Quality: 40% complete

The Mattson SHS 2800 RTA is a rapid thermal anneal system. The Mattson SHS 2800 RTA includes temperature measurement with a Ripple Pyrometer. The Mattson SHS 2800 RTA includes high cooling with a Jet Venturi System.^[1]^[2]^[3]

SHS 2800 RTA — Inventory photo — Fig. 01SHS 2800 RTAInventory photo^[1]

How it works

The Mattson SHS 2800 RTA uses a Ripple Pyrometer for temperature measurement. The Mattson SHS 2800 RTA uses a Jet Venturi System for high cooling.^[3]^[4]^[1]^[2]

What do the numbers mean?

Power & electrical2

Voltage: 380 V, 63.0 A, 50/60 Hz, 3 Phase^[1]
Electrical: 380 V, 63.0 A, 50/60 Hz, 3 Phase^[1]

Control & software7

Tool controller with Win7 (Updated 2018)^[1]; Remonte controller backside with monitor and keyboard^[1]; Tool controller with Win7 (Updated 2019)^[2]; Remote controller backside with monitor and keyboard^[2]; front-end or tool-controller configurations^[3]
Control configuration: Front End; tool-controller configurations^[3]
Control software: Win7 (Updated 2018) / Win7 (Updated 2019)^[3]

Configuration & options12

Front End^[1]; Temperature measurement with Ripple Pyrometer^[1]; High cooling with Jet Venturi System^[1]
Process: Oxid (BPSG + RTP)^[1]
Make: Mattson^[1]
Model: SHS 2800^[3]
Category: Thermal / Diffusion^[3]
Type: rapid thermal anneal system^[3]
Temperature measurement: Ripple Pyrometer^[1]
Cooling: Jet Venturi System^[1]
Vintage: 2000^[1]
Manufacturer: Mattson^[3]

Interested in this tool?

Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Voltage380 V, 63.0 A, 50/60 Hz, 3 Phase^[1]
Electrical380 V, 63.0 A, 50/60 Hz, 3 Phase^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What type of equipment is the Mattson SHS 2800 RTA?

The Mattson SHS 2800 RTA is a rapid thermal anneal system in the thermal and diffusion category.^[1]^[2]^[3]^[4]

Not publicly documented

The following facts about the SHS 2800 RTA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SHS 2800 RTA are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SHS 2800 RTA are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SHS 2800 RTA are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SHS 2800 RTA are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SHS 2800 RTA is not on record.
Answerable by: an OEM datasheet or a fab qualification report