Waferpedia

Comparison ledger

0242-36515 RTP XE Chamber Temperature Match KitversusMB 80 Mini Brute Diffusion

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Thermco MB 80 Mini Brute Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsThermco
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Thermco MB 80
Cited variants—
  • MB 80 Mini Brute Diffusion[1]
Specifications
Configuration—6.5 Bore[2]
Temperature—1200°C[2]
Manufacturer—Thermco[2]
Model—MB 80[2]
Type—Diffusion furnace[3]
Maximum temperature—1200°C[2]
Process capacity—Up to 6 in. wafers[4]
Furnace type—Horizontal tube atmospheric furnace system[4]
Processes—Oxidation, annealing, alloying[4]
Control—Manually controlled by the user[4]
Atmosphere features—Forming gas purge and water bubbler for wet oxidation applications[4]
Tube size—6 in. dia. inside dimension[5]
Controller—Digital programmable controller[5]
Temperature range—400°C to +1300°C[5]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]cores.research.asu.educores.research.asu.edu
  5. [5]yorkscientific.comyorkscientific.com