Thermco
MB 80 Mini Brute Diffusion
The Thermco MB 80 Mini Brute Diffusion is a diffusion furnace. The Thermco MB 80 Mini Brute Diffusion is a 6.5 bore, 3-zone, open-on-both-sides furnace rated to 1200°C. The Thermco MB 80 Mini Brute Diffusion processes pieces up to 6-inch wafers.[1][2]
What it is
General reference — not yet source-verifiedDiffusion furnaces are thermal processing tools used to heat semiconductor substrates in a controlled tube environment. Diffusion furnaces commonly support oxidation, annealing, alloying, and dopant drive-in steps in process flows where stable and repeatable high-temperature treatment is required.
How it works
General reference — not yet source-verifiedTube furnaces process substrates by placing them in a heated work tube and exposing them to a controlled thermal ambient. Thermal zones are used to shape the temperature profile along the process tube. Process gases can be introduced to support oxidation, annealing, alloying, or diffusion reactions at the wafer surface and within near-surface material regions.
Where it fits in the process flow
General reference — not yet source-verifiedDiffusion furnaces sit in the thermal module of semiconductor processing and are used after films or dopants have been introduced when a high-temperature treatment is needed. Diffusion furnace steps are commonly coordinated with cleaning, film deposition, implantation or coating, and later patterning or contact formation steps depending on the device flow.
Applications
The Mini Brute Tube Furnace model MB-80 is used for oxidation, annealing, and alloying. The Mini Brute Tube Furnace model MB-80 can process pieces up to 6-inch wafers. The user may set a temperature up to 900°C on the described configuration.[3]
What do the numbers mean?
Wafer handling1
Gas & chemistry1
Control & software2
Dimensions & facilities1
Configuration & options12
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| MB 80 Mini Brute Diffusion | — | — | — | waferpedia.com[5] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Atmosphere featuresForming gas purge and water bubbler for wet oxidation applications[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Thermco MB 80 Mini Brute Diffusion?
The Thermco MB 80 Mini Brute Diffusion is a diffusion furnace.[2]
Not publicly documented
The following facts about the MB 80 Mini Brute Diffusion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MB 80 Mini Brute Diffusion are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the MB 80 Mini Brute Diffusion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MB 80 Mini Brute Diffusion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MB 80 Mini Brute Diffusion is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the MB 80 Mini Brute Diffusion are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]cores.research.asu.edu — cores.research.asu.educores.research.asu.edu
- [4]yorkscientific.comyorkscientific.com
- [5]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 15, 2026.
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