Comparison ledger
Applied Materials 0720 06060 Part, Cascade Microtech EPS150TRIAX, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0720 06060 PartApplied Materials | EPS150TRIAXCascade Microtech |
|---|---|---|
| OEM | Applied Materials | Cascade Microtech |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0720 06060 Part | Cascade Microtech EPS150TRIAX |
| Specifications | ||
| Configuration | Contact Pin 24-20 Awg Crimp Gold Flash[1] | — |
| OEM | — | Cascade MicroTech[2] |
| Model | — | EPS150TRIAX[2] |
| Equipment type | — | Probe Station[2] |
| Enclosure | — | Light shield enclosure[2] |
| Measured quantities | — | Current, voltage, resistance, capacitance, conductance[2] |
| Capacitance and conductance measurement range | — | 20 Hz to 1 MHz[2] |
| Applications | — | I-V characterization; low current measurements; C-V characterization (at multiple frequencies); resistance and conductance measurements; sheet resistance and resistivity measurements of substrates and deposited films[2] |
| Microscope | — | Trinocular 6.7x stereo zoom microscope with 100x magnification[2] |
| Motion axes | — | Micropositioner movement in x, y, and z[2] |
| Probe station model | — | Cascade MicroTech EPS150TRIAX Probe Station[2] |
| Application | — | 150 mm manual probing solution for low-noise measurements[3] |
| Wafer size | — | 150 mm[4] |
| Measurement capabilities | — | Current, voltage, resistance, capacitance and conductance[2] |
| Capacitance and conductance frequency range | — | 20 Hz to 1 MHz[2] |
| Triaxial chuck | — | Dedicated triaxial chuck with <± 5 μm planarity[4] |
| Chuck movement | — | Chuck X/Y movement with < 5 μm resolution[4] |
| Contact/separation stroke | — | Unique 200 μm platen contact/separation stroke[4] |
| Probe placement repeatability | — | 1 μm repeatability[4] |
| Probe tips | — | PTT probe tips with 7 μm tip radius[4] |
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