Cascade Microtech

EPS150TRIAX

Research Quality: 30% complete

Cascade MicrotechEPS150TRIAX

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What is it?

The source identifies the equipment as a Cascade MicroTech EPS150TRIAX Probe Station with light shield enclosure. It is described as allowing probing of small features and measurement of current, voltage, resistance, capacitance, and conductance, with capacitance and conductance measurable over 20 Hz to 1 MHz.

What can it run?

Process applications and technology nodes documented for this tool.

I-V characterization
low current measurements
C-V characterization (at multiple frequencies)
resistance and conductance measurements
sheet resistance and resistivity measurements of substrates and deposited films

What do the numbers mean?

Power & electrical2

Measured quantities: Current, voltage, resistance, capacitance, conductance^[1]
Capacitance and conductance measurement range: 20 Hz to 1 MHz^[1]

Wafer handling1

Applications: I-V characterization; low current measurements; C-V characterization (at multiple frequencies); resistance and conductance measurements; sheet resistance and resistivity measurements of substrates and deposited films^[1]

Optics & imaging1

Microscope: Trinocular 6.7x stereo zoom microscope with 100x magnification^[1]

Configuration & options5

OEM: Cascade MicroTech^[1]
Model: EPS150TRIAX^[1]
Equipment type: Probe Station^[1]
Enclosure: Light shield enclosure^[1]
Motion axes: Micropositioner movement in x, y, and z^[1]

Interested in this tool?

Embed spec card

What replaced it?

siblingSignatone S-302-4— Listed as a separate four point resistivity probe station component in the same probe-station equipment set.source^[1]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Measured quantitiesCurrent, voltage, resistance, capacitance, conductance^[1]
Capacitance and conductance measurement range20 Hz to 1 MHz^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the EPS150TRIAX are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EPS150TRIAX are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the EPS150TRIAX are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the EPS150TRIAX are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EPS150TRIAX are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EPS150TRIAX is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources

[1]smif.pratt.duke.edu — smif.pratt.duke.edusmif.pratt.duke.edu
[2]EPS150TRIAX from Cascade Microtech — electronicsdatasheets.comelectronicsdatasheets.com