Cascade Microtech
The Cascade Microtech EPS150TRIAX is a 150 mm manual probing solution for low-noise measurements. The Cascade Microtech EPS150TRIAX supports probing small features and measuring current, voltage, resistance, capacitance, and conductance. The Cascade Microtech EPS150TRIAX uses a trinocular 6.7x stereo zoom microscope with 100x magnification.[1][2]
The EPS150TRIAX uses a triaxial signal path down to the device under test to support low-noise measurements. The EPS150TRIAX uses a vacuum chuck, magnetic-base micropositioners, and x, y, and z movement for probe placement.[1][2]
The EPS150TRIAX includes a trinocular stereo zoom microscope for visual alignment. The EPS150TRIAX supports current, voltage, resistance, capacitance, conductance, sheet resistance, and resistivity measurements through attached measurement instruments.[1][2]
The EPS150TRIAX fits in wafer-level and package-level electrical test workflows. The EPS150TRIAX is used for I-V characterization, C-V characterization, low current measurements, resistance and conductance measurements, and sheet resistance and resistivity measurements.[1]
The EPS150TRIAX supports low-current I-V measurements. The EPS150TRIAX supports C-V characterization over a frequency range from 20 Hz to 1 MHz.[1]
The EPS150TRIAX supports sheet resistance and resistivity measurements of substrates and thin films. The EPS150TRIAX also supports capacitance and conductance measurements.[1]
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The EPS150TRIAX supports current, voltage, resistance, capacitance, and conductance measurements. The EPS150TRIAX also supports sheet resistance and resistivity measurements of substrates and thin films.[1]
The EPS150TRIAX measures capacitance and conductance over a frequency range from 20 Hz to 1 MHz.[1]
The EPS150TRIAX uses a trinocular 6.7x stereo zoom microscope with 100x magnification.[1]
The EPS150TRIAX includes a vacuum chuck, magnetic-base micropositioners, and x, y, and z movement. The EPS150TRIAX also uses backlash-free x, y, and z movement of industry-standard positioners and a contact separation drive with 1 μm repeatability.[1][2]
The following facts about the EPS150TRIAX are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EPS150TRIAX are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the EPS150TRIAX are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the EPS150TRIAX are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EPS150TRIAX are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EPS150TRIAX is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 12, 2026.
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