Waferpedia

Comparison ledger

0720 06060 PartversusSU 3200 Single Wafer Processing

Applied Materials 0720 06060 Part, SCREEN SU 3200 Single Wafer Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
0720 06060 PartApplied Materials
OEMApplied MaterialsSCREEN
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0720 06060 PartSCREEN SU 3200
Specifications
ConfigurationContact Pin 24-20 Awg Crimp Gold Flash[1]12 Chamber Aquaspin[2]
Factory Interface—FOUP (4)[2]
Handler System—Kawasaki[2]
Software Version—Standard[2]
CIM—SECS / GEMS[2]
Process—SOM / SPM / SC1/ SC2 / 03W / DHF[2]
Software version—P2485STD00V2485STD00[3]
System power rating—208AC-3 Phase[3]
Wafer size—12 inch (300 mm)[2]
Maximum chambers—12 chambers in four three-level towers[4]
Throughput—up to 800 wafers per hour (WPH)[4]
Chemical supply options—dynamic direct injection (DDI) or cabinet-type chemical supply system[4]
Chamber volume reduction—about one-third of the previous model[4]
Processes—SOM / SPM / SC1/ SC2 / 03W / DHF[2]
Power rating—208AC-3 Phase[3]

Plan your fab

Building a Test & Probe process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]screen.co.jpscreen.co.jp