SCREEN

SU 3200 Single Wafer Processing

SCREEN SU 3200 family

Research Quality: 30% complete

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SU 3200 Single Wafer Processing — Inventory photo — Fig. 01SU 3200 Single Wafer ProcessingInventory photo^[1]

What is it?

SCREEN / DNS SU 3200 is a single-wafer processing system stated for 12-inch wafers.

Why won't it start?

Documented failure modes, common issues, and field considerations.

Multiple chambers down (hardware issues)

What do the numbers mean?

Power & electrical1

System power rating: 208AC-3 Phase^[2]

Wafer handling1

Handler System: Kawasaki^[1]

Control & software3

Factory Interface: FOUP (4)^[1]
Software Version: Standard^[1]
Software version: P2485STD00V2485STD00^[2]

Configuration & options5

12 Chamber Aquaspin^[1]
CIM: SECS / GEMS^[1]
Process: SOM / SPM / SC1/ SC2 / 03W / DHF^[1]; Multiple Chambers Down (Hardware Issues)^[1]; 4 Load ports^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

System power rating208AC-3 Phase^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the SU 3200 Single Wafer Processing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SU 3200 Single Wafer Processing are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SU 3200 Single Wafer Processing are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SU 3200 Single Wafer Processing are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the SU 3200 Single Wafer Processing is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SU 3200 Single Wafer Processing are on record.
Answerable by: an OEM parts catalog or a service engineer