Comparison ledger
Applied Materials Complus 4 T Darkfield Defect, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Complus 4 T Darkfield DefectApplied Materials | |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials Complus | KLA .204 PSL Wafer |
| Specifications | ||
| Configuration | Refurbished[1] | NIST Traceable[3] |
| Manufacturer | Applied Materials[1] | — |
| Model | Complus 4 T[1] | — |
| Category | Metrology & Inspection[2] | — |
| Wafer size | 12 inch[1] | — |
| Inspection type | Darkfield defect inspection[1] | — |
| Wafer Size | — | 8 inch[4] |
| Traceability | — | NIST[5] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[3] |
| NIST Traceable | — | Yes[4] |
| Compatible tools | — | Surfscan 6xy0 and Sp1 particle counters[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →