Waferpedia

KLA

.204 PSL Wafer

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

KLA.204 PSL Wafer
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What is it?

The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.

What do the numbers mean?

Wafer handling1

Wafer Size
8 inch[1]
Accurate?

Configuration & options4

NIST Traceable[1]
Accurate?
Capable on Surfscan 6xy0 and Sp1[1]
Accurate?
Traceability
NIST[1]
Accurate?
Compatible Tools
Surfscan 6xy0, Sp1[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer size is the KLA .204 PSL Wafer?

The KLA .204 PSL Wafer is an 8-inch wafer.[1]

What inspection tools is the KLA .204 PSL Wafer compatible with?

The wafer is capable on Surfscan 6xy0 and SP1 tools.[1]

Is the KLA .204 PSL Wafer NIST traceable?

Yes, it is NIST traceable.[1]

Not publicly documented

The following facts about the .204 PSL Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the .204 PSL Wafer are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the .204 PSL Wafer are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the .204 PSL Wafer are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the .204 PSL Wafer are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the .204 PSL Wafer is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing
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Last updated Aug 14, 2026.

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