KLA
.204 PSL Wafer
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer. The KLA .204 PSL Wafer is compatible with Surfscan 6xy0 and Sp1 particle counters.[1][2]
What it is
How it works
General reference — not yet source-verifiedReference wafers for particle inspection are used as stable standards for tool setup and verification. Particle inspection tools scan wafer surfaces and compare detected scattering or signal response against expected behavior from the reference standard. A PSL reference wafer carries calibrated particulate features that help check whether an inspection tool is responding consistently.
Where it fits in the process flow
The KLA .204 PSL Wafer is used for calibrating particle detection systems. The KLA .204 PSL Wafer is employed in the metrology and inspection segment of semiconductor manufacturing. The KLA .204 PSL Wafer is used during tool qualification, periodic recalibration, and sensitivity verification of surface inspection systems.[2]
What do the numbers mean?
Wafer handling1
Configuration & options7
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the .204 PSL Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the .204 PSL Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the .204 PSL Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the .204 PSL Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the .204 PSL Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the .204 PSL Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]KLA .204 PSL Wafer vs KLA 2135 | Waferpedia — waferpedia.comwaferpedia.com
- [5]KLA .204 PSL Wafer vs KLA Alpha Step 500 | Waferpedia — waferpedia.comwaferpedia.com
- [6]KLA .204 PSL Wafer vs KLA P 22 Surface | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 20, 2026.
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