Comparison ledger
Applied Materials Complus 4 T, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Complus 4 TApplied Materials | |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials Complus | KLA 1.112 PSL Wafer |
| Specifications | ||
| Configuration | Asyst L P2200 SMIF Load Ports[1] | NIST Traceable[4] |
| MC Workstation | SUN[1] | — |
| Software Version | 10.6 on WS[1] | — |
| IP Computer | 9.6[1] | — |
| Installed magnifications | GF 15, GF 20, GF 30, GF 40, GF 20 T , GF 30 T ,GF 40 T[1] | — |
| Custom Wafer Chuck | 12”/ 8” Standard[1] | — |
| Manufacturer | Applied Materials[1] | — |
| Model | Complus 4 T[1] | — |
| Equipment type | Inspection System[2] | — |
| Category | Metrology & Inspection[2] | — |
| Wafer size | 8 inch[1] | — |
| Wafer size support | 8-inch wafer size support[2] | — |
| Asyst load ports | Asyst L P2200 SMIF Load Ports[1] | — |
| Robot | Yaskawa Robot (Dual Blade)[1] | — |
| Workstation | SUN[1] | — |
| IP Computer version | 9.6[1] | — |
| Optics | OM Installed[1] | — |
| Review head | Custom Review Head Olympus (P/N: 0090-A0422)[1] | — |
| Pre-aligner | Yaskawa 8” semi wafers[1] | — |
| End effector | dual 12” / 8”[1] | — |
| Wafer chuck | 12”/ 8” Standard[1] | — |
| Operational note | Cannot saver tilt recipes[1] | — |
| Inspection type | Darkfield defect inspection[3] | — |
| Wafer Size | — | 8 inch[4] |
| NIST Traceable | — | True[4] |
| Compatible Tools | — | Surfscan 6xy0 and Sp1[5] |
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