Waferpedia

Applied Materials

Complus 4 T

Metrology & InspectionApplied Materials Complus family
Research Quality: 30% complete
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Complus 4 T — Inventory photo
Fig. 01Complus 4 TInventory photo[1]

What is it?

Applied Materials Complus 4 T is an inspection system stated with 8-inch wafer size support.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Cannot saver tilt recipes

What do the numbers mean?

Wafer handling4

Yaskawa Robot (Dual Blade)[1]
Accurate?
Pre-aligner Yaskawa 8” semi wafers[1]
Accurate?
End Effector dual 12” / 8”[1]
Accurate?
Custom Wafer Chuck
12”/ 8” Standard[1]
Accurate?

Optics & imaging1

Installed magnifications
GF 15, GF 20, GF 30, GF 40, GF 20 T , GF 30 T ,GF 40 T[1]
Accurate?

Control & software3

Software Version
10.6 on WS[1]
Accurate?
IP Computer
9.6[1]
Accurate?
Cannot saver tilt recipes[1]
Accurate?

Configuration & options3

Asyst L P2200 SMIF Load Ports[1]
Accurate?
MC Workstation
SUN[1]
Accurate?
OM Installed - Custom Review Head Olympus (P/N: 0090-A0422)[1]
Accurate?
Interested in this tool?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Complus 4 T are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Complus 4 T are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Complus 4 T are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Complus 4 T are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the Complus 4 T is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Complus 4 T are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Equipment inventory listing
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Last updated Jul 29, 2026.

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