Comparison ledger
Applied Materials Mirra Mesa and GigaMat 3806 L, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | Mirra MesaApplied Materials | 3806 LGigaMat |
|---|---|---|
| OEM | Applied Materials | GigaMat |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials Mirra Mesa | GigaMat 3806 L |
| Specifications | ||
| CMP Model | Mirra Mesa[2] | — |
| Process | OX[2] | — |
| Polisher System Module | 4 Head 3 Platen[2] | — |
| Configuration | Platen 1 configuration:[2] | With Water Jet[1] |
| Platen 1 Type | With window, belt + gear CVT[2] | — |
| Platen 1 endpoint | Full scan and motor torque[2] | — |
| Platen 1 slurry arm | Standard tunable[2] | — |
| Platen 1 pad conditioner arm | Standard[2] | — |
| Platen 2 Type | With window, belt + gear CVT[2] | — |
| Platen 2 endpoint | Full scan[2] | — |
| Platen 2 slurry arm | Standard tunable[2] | — |
| Platen 2 pad conditioner arm | Standard[2] | — |
| Platen 3 Type | With window, belt + gear CVT[2] | — |
| Platen 3 endpoint | Full scan[2] | — |
| Platen 3 slurry arm | Standard tunable[2] | — |
| Platen 3 pad conditioner arm | Standard[2] | — |
| Polishing head | 3 zone[2] | — |
| Slurry Delivery | 2 types of slurry[2] | — |
| Voltage | — | 480 VAC[1] |
| Frequency | — | 60 Hz[1] |