Applied Materials

Mirra Mesa

CMP Applied Materials Mirra Mesa family

Research Quality: 30% complete

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Mirra Mesa — Inventory photo — Fig. 01Mirra MesaInventory photo^[1]

What is it?

Applied Materials Mirra Mesa is a CMP (Chemical Mechanical Polisher) with a 4-head, 3-platen polisher system module.

What do the numbers mean?

Gas & chemistry4

Platen 1 slurry arm: Standard tunable^[3]
Platen 2 slurry arm: Standard tunable^[3]
Platen 3 slurry arm: Standard tunable^[3]
Slurry Delivery: 2 types of slurry^[3]

Configuration & options16

CMP Model: Mirra Mesa^[3]
Process: OX^[3]
Polisher System Module: 4 Head 3 Platen^[3]; Platen 1 configuration:^[3]
Platen 1 Type: With window, belt + gear CVT^[3]
Platen 1 endpoint: Full scan and motor torque^[3]
Platen 1 pad conditioner arm: Standard^[3]; Platen 2 configuration:^[3]
Platen 2 Type: With window, belt + gear CVT^[3]
Platen 2 endpoint: Full scan^[3]
Platen 2 pad conditioner arm: Standard^[3]; Platen 3 configuration:^[3]
Platen 3 Type: With window, belt + gear CVT^[3]
Platen 3 endpoint: Full scan^[3]
Platen 3 pad conditioner arm: Standard^[3]
Polishing head: 3 zone^[3]

Interested in this tool?

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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

GigaMat 3806 L— Same function class: CMP, UnknownCompare in depthsource^[4]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Platen 1 slurry armStandard tunable^[3]
Platen 2 slurry armStandard tunable^[3]
Platen 3 slurry armStandard tunable^[3]
Slurry Delivery2 types of slurry^[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Mirra Mesa are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Mirra Mesa are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Mirra Mesa are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Mirra Mesa are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Mirra Mesa are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Mirra Mesa is not on record.
Answerable by: an OEM datasheet or a fab qualification report