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NanoSEM 3 D CD-SEMversus.496 PSL Wafer

Applied Materials NanoSEM 3 D CD-SEM, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
NanoSEM 3 D CD-SEMApplied Materials
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones2001 Vintage year—
Control system——
Generation——
FamilyApplied Materials NanoSEM 3 D CD-SEMKLA .496 PSL Wafer
Specifications
ConfigurationSoftware Version 14.3.0[1]NIST Traceable[3]
Supply Voltage120 / 208 VAC[2]—
Full load Current10 A[2]—
Largest Load Ampere Rating8 A[2]—
Wafer Size6 inch[1]—
Software Version14.3.0[1]—
Frequency50/60 Hz[2]—
Number of Wires5[1]—
TypeCritical dimension scanning electron microscope[2]—
Manufacture year2001[2]—
Wafer size—8 inch[3]
Traceability—NIST Traceable[3]
Compatible systems—Capable on Surfscan 6xy0 and SP1[3]
Category—Metrology & Inspection[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com