Applied Materials
NanoSEM 3 D CD-SEM
The Applied Materials NanoSEM 3 D CD-SEM is a critical dimension scanning electron microscope. The NanoSEM 3 D supports 6-inch wafer sizes and was manufactured in 2001.[1]
What it is
The NanoSEM 3 D accepts 6-inch wafers. The system operates on a supply voltage of 120/208 VAC at 50/60 Hz with a full load current of 10 A and a largest load ampere rating of 8 A.[1]
What do the numbers mean?
Power & electrical3
- 50/60 Hz[1]
Wafer handling1
Control & software2
- Software Version 14.3.0[1]
Configuration & options4
- 5 Wires[1]
Vintage & configurations
- 2001Vintage year[1]
Equipment vintage year 2001
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the NanoSEM 3 D?
Who is the manufacturer?
The manufacturer is Applied Materials.[1]
Not publicly documented
The following facts about the NanoSEM 3 D CD-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the NanoSEM 3 D CD-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NanoSEM 3 D CD-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NanoSEM 3 D CD-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NanoSEM 3 D CD-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the NanoSEM 3 D CD-SEM are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Inventory photo
Last updated Aug 14, 2026.
Compare with similar tools
View all →The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA 0035235-003 MMD Head is a TSTD PCB ASSY, MMD MEAS HEAD compatible with the KLA AIT-XP.