Comparison ledger
Applied Materials UVision 200 Brightfield, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | UVision 200 BrightfieldApplied Materials | |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials UVision | KLA .204 PSL Wafer |
| Specifications | ||
| Configuration | Isoport[1] | NIST Traceable[3] |
| Frequency | 60 Hz[1] | — |
| Manufacturer | Applied Materials[1] | — |
| Model | UVision 200 Brightfield[2] | — |
| Category | Metrology & Inspection[1] | — |
| Tool type | brightfield inspection system[1] | — |
| Wafer handling | 300/200mm end effector[1] | — |
| Startup specification | Standard start up spec[2] | — |
| Option | OHT P I/O sensor for E84 (Hokuyo) L=5m[2] | — |
| Wafer Size | — | 8 inch[4] |
| Traceability | — | NIST[5] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[3] |
| NIST Traceable | — | Yes[4] |
| Compatible tools | — | Surfscan 6xy0 and Sp1 particle counters[4] |
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