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Comparison ledger

VIISta Plad High Currentversus160 XP

Applied Materials VIISta Plad High Current, Varian 160 XP, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
VIISta Plad High CurrentApplied Materials
160 XPVarian
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials VIISTAVarian 160 XP
Cited variants—
Specifications
ConfigurationChamber only[2]—
ManufacturerApplied Materials[2]—
CategoryIon Implantation[2]—
Tool typeHigh current ion implanter[2]—
Wafer size12-inch[2]—
Configuration (160 XP Ion variant)—150mm High Current IMP[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]waferpedia.comwaferpedia.com