ASM
Epsilon 3200 Epitaxial Reactor alternatives
Comparable Deposition equipment documented in the Waferpedia catalog.
6 comparable tools
Applied Materials
0010-13622 RF Match for
Deposition
Oxford Instruments
100
Deposition
CEE
100 CB Spin
Deposition
Oxford Instruments
100 Nitride
Deposition
The Oxford 100 Nitride is a deposition system manufactured by Oxford Instruments for depositing nitride layers.
Oxford Instruments
100 Plus Nitride
Deposition
The Oxford 100 Plus Nitride is a nitride deposition system made by Oxford.
CHA
1000
Deposition
The CHA 1000 is a 5-inch evaporator system with a 6-pocket E-gun, SR 10 power supply, and tri dome system.
Compare interactively
Need a side-by-side spec table? Open the compare tool to pick any two models.
Compare Epsilon 3200 Epitaxial Reactor with another model →