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Comparison ledger

LinDAversus2200 EVO

ASM LinDA, Besi 2200 EVO, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Documented as functional equivalents— Same function class: Packaging & Bonding, null[1]
Side-by-side comparison of selected equipment models
Attribute
OEMASMBesi
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyASM LinDABesi 2200
Cited variants
  • Datacon 2200 evo plus[3]
  • Datacon 2200 evo hF[3]
  • Datacon 2200 evo hS[3]
  • Datacon 2200 evo advanced[4]
Specifications
Voltage200 VAC, Single Phase[5]—
Configuration50/60 Hz[5]Dual Head[6]
Vintage (manufacture year)2012[5]—
Machine typeDie bonder[1]—
CategoryPackaging & Bonding[1]—
Power200 VAC, single phase, 50/60 Hz[5]—
Vintage2012[5]—
Power supply—3 x 400 v[7]
U nominal—3 x 400 V[7]
X/Y placement accuracy—±10 µm @ 3s[3]
Theta placement accuracy—±0.15° @ 3s[3]
Bond force—0.5N to 75N programmable[3]
Throughput (die attach)—up to 7,000 UPH/module[3]
Throughput (flip chip with dipping)—up to 2,500 UPH/module[3]
Throughput (flip chip without dipping)—up to 3,200 UPH/module[3]
Number of working heads—up to 4[3]
Die size (die attach)—0.17 mm - 50 mm[3]
Die size (flip chip)—0.5 mm - 50 mm[3]
Die thickness—>50 µm (thinner on request)[3]
Wafer size—4" - 12" (SEMI M1)[3]
Substrate working range—13" x 8" (325 mm x 200 mm)[3]
Machine dimensions (LxDxH)—1,160 mm x 1,225 mm x 1,750 mm[3]
Weight—1,300 kg[3]
Uptime—> 98 %[3]
Yield—> 99.95 %[3]
Heated bond head temperature—up to 450°C (optional)[3]
UV curing wavelengths—365 nm & 405 nm[3]
UPH (Die attach)—up to 7,000 UPH/module[3]
UPH (Flip Chip with dipping)—up to 2,500 UPH/module[3]
UPH (Flip Chip without dipping)—up to 3,200 UPH/module[3]
Bond head rotation—0° - 360°[3]
UV Curing—365 nm & 405 nm[3]
Frame size—FF070, FF105, FF108, FF123; automatic change[3]
Head configuration—Dual Head[6]
Product type—High-accuracy multi-chip die bonder[3]
Applications—Die attach, flip chip, multi-chip[3]
Integrated dispenser—Yes[3]
Wafer handling—12" wafer handling[3]
Automatic tool changer—Yes[3]
Die attach throughput—up to 7,000 UPH/module[3]
Flip chip throughput with dipping—up to 2,500 UPH/module[3]
Flip chip throughput without dipping—up to 3,200 UPH/module[3]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]dynamicmos.comdynamicmos.com
  3. [3]besi.combesi.com
  4. [4]besi.combesi.com
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]inventory listing