Comparison ledger
Axcelis 17099370 Outer strike plate, Axcelis NV GSD A 80, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 17099370 Outer strike plateAxcelis | NV GSD A 80Axcelis |
|---|---|---|
| OEM | Axcelis | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis 17099370 Outer strike plate | Axcelis NV GSD A 80 |
| Specifications | ||
| Configuration | Used with Axcelis GSD 200[1] | Pumps:[3] |
| Manufacturer | Axcelis[2] | Axcelis[3] |
| Model | 17099370 Outer strike plate[1] | NV GSD A 80[3] |
| Part number | OEM number 17099370[2] | — |
| Used with | Axcelis GSD 200[1] | — |
| Condition | NEW[2] | — |
| Phase | — | 3 Phase[3] |
| Power | — | 30 KVA[3] |
| Voltage | — | 200 V[4] |
| Frequency | — | 50 Hz[4] |
| Gas | — | BF3, ASH3, AR[3] |
| P1 | — | Turbo Pump Mitsubishi PT 1500[3] |
| P2 | — | Cyro Pump Suzuki-Syokan A200[3] |
| P3 | — | Cryo Pump Suzuki-Syokan A300[3] |
| RP1 | — | Dry Pump Ebara A07V[3] |
| RP2 | — | Dry Pump Ebara A30V[3] |
| RP3 | — | Alcatel Drytel34[3] |
| Equipment type | — | Ion implanter[5] |
| Wafer size | — | 8 inch[3] |
| Power rating | — | 30 KVA[3] |
| Gas delivery | — | BF3, ASH3, AR[3] |
| Pump P1 | — | Turbo Pump Mitsubishi PT 1500[3] |
| Pump P2 | — | Cyro Pump Suzuki-Syokan A200[3] |
| Pump P3 | — | Cryo Pump Suzuki-Syokan A300[3] |
| Pump RP1 | — | Dry Pump Ebara A07V[3] |
| Pump RP2 | — | Dry Pump Ebara A30V[3] |
| Pump RP3 | — | Alcatel Drytel34[3] |
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