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Axcelis

NV GSD A 80

Ion ImplantationAxcelis NV GSD A 80 family
Research Quality: 20% complete
NV GSD A 80 — Inventory photo
Fig. 01NV GSD A 80Inventory photo[1]

Power

3 Phase[1]

Vacuum

Pumps:[1]

Gas delivery

BF3, ASH3, AR[1]

What is it?

What do the numbers mean?

Power & electrical5

Phase
3 Phase[1]
Accurate?
Voltage
200 V[1]
Accurate?
Frequency
50 Hz[1]
Accurate?
RP1
Dry Pump Ebara A07V[1]
Accurate?
RP2
Dry Pump Ebara A30V[1]
Accurate?

Vacuum & pumping4

Pumps:[1]
Accurate?
P1
Turbo Pump Mitsubishi PT 1500[1]
Accurate?
P2
Cyro Pump Suzuki-Syokan A200[1]
Accurate?
P3
Cryo Pump Suzuki-Syokan A300[1]
Accurate?

Gas & chemistry1

Gas
BF3, ASH3, AR[1]
Accurate?

Configuration & options2

Power
30 KVA[1]
Accurate?
RP3
Alcatel Drytel34[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase[1]
  • Voltage200 V[1]
  • Frequency50 Hz[1]
  • GasBF3, ASH3, AR[1]
  • ConfigurationPumps:[1]
  • P1Turbo Pump Mitsubishi PT 1500[1]
  • P2Cyro Pump Suzuki-Syokan A200[1]
  • P3Cryo Pump Suzuki-Syokan A300[1]
  • RP1Dry Pump Ebara A07V[1]
  • RP2Dry Pump Ebara A30V[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Axcelis NV GSD A 80?

It is an ion implanter.[1]

Not publicly documented

The following facts about the NV GSD A 80 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NV GSD A 80 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NV GSD A 80 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NV GSD A 80 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NV GSD A 80 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NV GSD A 80 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
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Last updated Jul 29, 2026.

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