Comparison ledger
Axcelis 200 ACU, Tokyo Electron TE 8401 Poly, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | TE 8401 PolyTokyo Electron |
|---|---|---|
| OEM | Axcelis | Tokyo Electron |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Tokyo Electron TE 8401 |
| Cited variants | — | |
| Specifications | ||
| Configuration | Parts Machine[2] | Single chamber[6] |
| Manufacturer | Axcelis[2] | Tokyo Electron[6] |
| Model | 200 ACU[2] | TE 8401 Poly[6] |
| Tool type | Asher[2] | — |
| Wafer size | 200mm[4] | 8-inch wafers[1] |
| Serial number | AU6A356AH[4] | — |
| Computer system | M 200 PC, M 200[5] | — |
| Part number | SC 4572 A[5] | — |
| Volts | 208[5] | — |
| Amps | 30[5] | — |
| Equipment type | Asher[2] | — |
| Wafer configuration | 8 inch[3] | — |
| LD | — | 2 each[6] |
| Gas | — | He, O2, CF4, HBr, CL2[6] |
| OS | — | EPROM based system[6] |
| Pumps | — | 2[6] |
| Gas delivery | — | He, O2, CF4, HBr, CL2[6] |
| Vintage | — | 1998[6] |
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