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Tool family

Tokyo Electron TE 8401

Tokyo ElectronEtch2 entries
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Models in this family

  1. TE 8401 Dry
  2. TE 8401 Poly

    The Tokyo Electron TE 8401 Poly is a single-chamber poly etcher with two pumps and gas lines for He, O2, CF4, HBr, and CL2.

All entries

  1. TE 8401 DryTokyo Electron
    CategoryEtch
    9 specs
  2. TE 8401 PolyTokyo Electron

    The Tokyo Electron TE 8401 Poly is a single-chamber poly etcher with two pumps and gas lines for He, O2, CF4, HBr, and CL2.

    CategoryEtch
    5 specs