Comparison ledger
Axcelis 200 PCU Photoresist Stabilizer, SUSS MicroTec Falcon ACS 200 Coater Developer Cluster, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Falcon ACS 200 Coater Developer ClusterSUSS MicroTec | |
|---|---|---|
| OEM | Axcelis | SUSS MicroTec |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | SUSS MicroTec Falcon |
| Cited variants | — |
|
| Specifications | ||
| Configuration | 14 Amps[2] | Developer (4)[1] |
| Voltage | 380 V[2] | — |
| Frequency | 50 Hz[2] | — |
| Phase | 3 Phase[2] | — |
| Manufacturer | Axcelis[4] | — |
| Model | 200 PCU[4] | Falcon ACS 200[6] |
| Tool type | photoresist stabilizer[4] | — |
| Category | Resist Processing[4] | Resist Processing[6] |
| Power | 14 Amps[2] | — |
| Wafer Sizes | — | 4, 5, 6, 8 inch[5] |
| Configuration (Asset #142142) | — | Developer (4) 2000 Vintage[1] |
| Configuration (Asset #142141) | — | Coater (3) 2000 Vintage[5] |
| OEM | — | SUSS[1] |
| Equipment type | — | Coater / Developer Cluster System[6] |
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