Comparison ledger
Axcelis 200 PCU, Varian E 1000 HP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 PCUAxcelis | E 1000 HP IonVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2000 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Varian E 1000 HP Ion |
| Cited variants | — | |
| Specifications | ||
| P/N | SC 4840 A[3] | — |
| Frequency | 50 Hz[3] | — |
| Phase | 3 Phase[3] | 3 Phase[4] |
| Voltage | 400 V[3] | — |
| Configuration | — | Leybold QDP-80, D8 Roughing Pumps[4] |
| OEM | — | Varian[5] |
| Model | — | E 1000 HP[5] |
| Asset # | — | 126887[5] |
| Wafer sizes | — | 6, 8 inch[4] |
| Power | — | 3 Phase[4] |
| Roughing pumps | — | Leybold QDP-80, D8 Roughing Pumps[4] |
| Cryo compressor | — | CTI 8250 Cryo Compressor (x2)[4] |
| Manuals | — | Included[4] |
| Vintage | — | 1995[4] |
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