Axcelis

200 PCU

Axcelis NV GSD 200 family

Research Quality: 10% complete

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Axcelis200 PCU

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What is it?

Why won't it start?

Documented failure modes, common issues, and field considerations.

One source states the system was not currently operational due to robot parameters needing re-teaching.

What do the numbers mean?

Power & electrical3

Frequency: 50 Hz^[2]
Phase: 3 Phase^[2]
Voltage: 400 V^[2]

Configuration & options1

P/N: SC 4840 A^[2]

Vintage & configurations

2000-06-01Vintage^[1]
Source lists vintage 01.06.2000.

Documented models & variants

Designation	Generation	Vintage	Changes	Source
Fusion 200 PCU	—	—	—	exapro.com^[3]
Fusion 200 PCU-P	—	2000	Described as a UV Bake version; source lists 200 mm open cassette loading, 380 / 220 VAC, through-the-wall type, and a 2-d robot type.	fabsurplus.com^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Frequency50 Hz^[2]
Phase3 Phase^[2]
Voltage400 V^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 200 PCU are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

The control-system platform and OS era of the 200 PCU are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 200 PCU is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 200 PCU are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 200 PCU are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No description of the 200 PCU is on record.
Answerable by: an engineer who operated it or an OEM application specialist

Sources & citations

Sources (4)Every fact above is drawn from these public sources

[1]fabsurplus.com — fabsurplus.comfabsurplus.com
[2]inventory listing
[3]exapro.com — exapro.comexapro.com
[4]Axcelis Axcelis Fusion 200 P Axcelis Fusion 200 Pcu Photostabilizer System Consisting Of: - Model: Fusion 200 Pcu - Max Wafer Size Capable: 200mm- Shielded Secs Cables- Uv Bake Pr . Product Category: Semiconductor, Sub Category: Semiconductor - Misc Refurbished — yorkscientific.comyorkscientific.com