Comparison ledger
Axcelis GSD 200 E 2 High Current, Varian E 500 EHPI Ion Implant, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | GSD 200 E 2 High CurrentAxcelis | E 500 EHPI Ion ImplantVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 2000– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis GSD 200 | Varian E 500 EHPI Ion Implant |
| Cited variants |
| — |
| Specifications | ||
| Software Version | VM 8.0 (Virtual Machine)[1] | V15.10.12[4] |
| CIM | SECs[1] | — |
| Process | B11, BF2, As, P[1] | — |
| Handler System | Arm (Non HPES), In Air Handler[1] | — |
| Factory Interface | None[1] | — |
| Option System | Silicon Disk, SEF EGUN[1] | — |
| Configuration | Blade Server 120006095C Excluded[1] | CE Mark[4] |
| Process Species | B11, BF2, As, P[1] | — |
| Vintage | 2001[1] | 2000[4] |
| Disk Drive | Direct-Drive[2] | — |
| Dose Type | Regular[2] | — |
| Source Type | ELS4 IHC-Source without Vaporizer[2] | — |
| Main Workstation | SUN Solaris AXI 3HE (special case)[2] | — |
| Second Workstation | SUN Sparc5 on cart with printer[2] | — |
| CIM Interface | SECs[1] | — |
| Wafer Size | 8 inch[1] | 6 inch[4] |
| High Voltage Transformer | both Oil/Light[2] | — |
| Tower Color | red/yellow/green; no buzzer[2] | — |
| Network | 24-port 100MB Ethernet with Cisco Router[2] | — |
| Kit Cell Controller | 177[2] | — |
| Options | Accel-Highvoltage Probe installed, HPES-Upgrade installed[2] | — |
| Power | — | 208 V,50/60 Hz, 3 Phase[4] |
| Connection | — | Top[4] |
| Source 1 | — | IHC[4] |
| Extraction Electrode | — | EHP[4] |
| Bushing | — | EHP[4] |
| CE Mark | — | Yes[4] |
| Control Computer | — | Windows 7[4] |
| Chuck system | — | ESC[4] |
| Computer | — | Win7[4] |
| Software | — | V15.10.12[4] |
| Source Turbo | — | Pfeiffer[4] |
| Analyzer Turbo | — | Pfeiffer[4] |
| Scanner Turbo | — | Pfeiffer[4] |
| LoadLock right | — | Cryo[4] |
| LoadLock left | — | Cryo[4] |
| Source/Terminal | — | Edwards Setup[4] |
| Differential Seal | — | Busch Scroll Fossa 15[4] |
| End station / Load Lock | — | Edwards Setup[4] |
| Cryo Comp | — | 9700A[4] |
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