Axcelis

GSD 200 E 2 High Current

Ion Implantation Axcelis GSD 200 family

Research Quality: 30% complete

LinkedIn X Email

GSD 200 E 2 High Current — Inventory photo — Fig. 01GSD 200 E 2 High CurrentInventory photo^[1]

What is it?

The Axcelis GSD 200 E 2 is a high current implanter with source-stated wafer sizes of 6 inch and 8 inch.

What do the numbers mean?

Wafer handling1

Handler System: Arm (Non HPES), In Air Handler^[1]

Control & software2

Software Version: VM 8.0 (Virtual Machine)^[1]
Factory Interface: None^[1]

Configuration & options10

CIM: SECs^[1]
Process: B11, BF2, As, P^[1]
Option System: Silicon Disk, SEF EGUN^[1]; Blade Server 120006095C Excluded^[1]; AsH3, BF3^[2]; Refurbished^[2]; CE Marked^[2]; HPES-Upgrade installed, but upgrades were stopped after HPES-Upgrade^[2]; Missing:^[2]; Clean-Room Table on frontside - 0.5L Xe-Plasma-Bottle Holder + Terminal Water Cover^[2]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
GSD 200 E 2	—	—	One source states 8 inch wafer size and lists software, CIM, process, handler, factory interface, and option details; another source states 6 inch wafer size.	Equipment inventory listing^[1]

Interested in this tool?

Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the GSD 200 E 2 High Current are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the GSD 200 E 2 High Current are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the GSD 200 E 2 High Current are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the GSD 200 E 2 High Current are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the GSD 200 E 2 High Current is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the GSD 200 E 2 High Current are on record.
Answerable by: an OEM parts catalog or a service engineer