Comparison ledger
Axcelis NV 6200 A Ion, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NV 6200 A IonAxcelis | 160 XP IonVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV 6200 A Ion | Varian 160 XP Ion |
| Specifications | ||
| Configuration | Source roughing pump needs replacement[1] | 150mm High Current IMP[3] |
| Manufacturer | Axcelis[1] | — |
| Model | NV 6200 A[1] | 160 XP Ion[4] |
| Equipment type | Ion Implanter[1] | — |
| Wafer size | 6 inch[1] | — |
| Vacuum & pumping | Source roughing pump needs replacement[2] | — |
| Gas & chemistry | Spare isolation transformer and gas boxes included[2] | — |
| OEM | — | Varian[4] |
| Category | — | Ion Implantation[3] |
| Tool type | — | ion implanter[3] |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →