Axcelis
NV GSD III LE High Current Ion alternatives
Comparable Ion Implantation equipment documented in the Waferpedia catalog.
6 comparable tools
Varian
0216 7696, E 11368072 ESC
Ion Implantation
Varian
160 XP
Ion Implantation
Varian
160 XP Ion
Ion Implantation
Agilent
350 D
Ion Implantation
Agilent
350 D Ion
Ion Implantation
Varian
350D
Ion Implantation
The Varian 350D is a medium current ion implanter that was the tool of choice for semiconductor doping in the early 1980s.
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