Waferpedia

Category

Ion Implantation

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132 entries

  1. 350DVarian

    The Varian 350D is a medium current ion implanter that was the tool of choice for semiconductor doping in the early 1980s.

    CategoryIon Implantation
    Discontinued
  2. VIISta HC Ion ImplantApplied Materials

    The Applied Materials / Varian VIISta HC Ion Implant is an ion implantation system.

    CategoryIon Implantation
  3. Viision 200 IonVarian

    The Varian Viision 200 is an ion implanter for 8-inch wafers.

    CategoryIon Implantation
  4. Kestrel 750Varian

    The Varian Kestrel 750 is an ion implanter that handles 200 mm wafers and is classified as a MEV Implanter.

    CategoryIon Implantation
  5. NV GSD HEAxcelis

    The Axcelis NV GSD HE is an ion implantation system that can handle 6-inch and 8-inch wafers.

    CategoryIon ImplantationWafer8"
  6. NV 8250 IonAxcelis
    CategoryIon Implantation
  7. E 220 HP IonVarian

    The Varian E 220 HP is an ion implanter that handles 6-inch and 8-inch wafers.

    CategoryIon Implantation
  8. VIISta HE XPApplied Materials

    The VIISta HE XP is a high-current ion implanter for semiconductor wafer processing.

    CategoryIon Implantation
  9. Viision 200Varian

    The Varian Viision 200 (also spelled VIISion 200) is a batch-process, high-current ion implanter for 200 mm wafers, introduced in 1996.

    CategoryIon Implantation
  10. TP 420 Implant Dosing MeasurementKLA
    CategoryIon Implantation
  11. Exceed 30Nissin
    CategoryIon Implantation
  12. NH 20 SP Medium Current IonNissin
    CategoryIon Implantation
  13. NV 6200Axcelis
    CategoryIon Implantation
  14. Kestrel II 750Varian
    CategoryIon ImplantationWafer10 Site Disk, 10 Wafer per Batch
  15. SEN NV GSD III 180 High Current IonSumitomo

    The Sumitomo / SEN NV GSD III 180 is a high current ion implanter stated to be for 6-inch wafers.

    CategoryIon Implantation
  16. Viision 80 Medium Current IonVarian

    Varian Viision 80 is a medium current ion implanter with an 8-inch wafer size.

    CategoryIon Implantation
  17. IMP HEAT Medium CurrentNissin
    CategoryIon Implantation
  18. TP 500 Implant Dosing MeasurementKLA
    CategoryIon Implantation
  19. Purion H 200 High CurrentAxcelis
    CategoryIon Implantation
  20. GSD 200 E High CurrentAxcelis
    CategoryIon Implantation
  21. GSD 100 High CurrentAxcelis
    CategoryIon Implantation
  22. Viision 200 + High CurrentVarian

    The Varian Viision 200+ (also known as Viision 200 Plus and VIISion 200) is a high current ion implanter used for semiconductor wafer processing.

    CategoryIon Implantation
  23. EHP 500Applied Materials

    The Applied Materials / Varian EHP 500 is an ion implanter for 6-inch wafers.

    CategoryIon Implantation
  24. E 500Agilent

    The Agilent / Varian E 500 is an 8-inch medium current ion implanter.

    CategoryIon Implantation
  25. NV GSD High EnergyAxcelis
    CategoryIon Implantation
  26. GSD HE High EnergyAxcelis
    CategoryIon Implantation
  27. VAC 407 2 ABrooks
    CategoryIon Implantation
  28. EHPI E 220Varian

    The Varian EHPI E 220 is an ion implanter described as an 8-inch, medium-current system with a SMIF interface.

    CategoryIon Implantation
  29. NV GSD III LE High Current IonAxcelis
    CategoryIon Implantation
  30. NV GSD III 90 IonAxcelis
    CategoryIon Implantation
  31. PI 9500 XRApplied Materials
    CategoryIon Implantation
  32. NV GSD 200Axcelis

    The Axcelis NV GSD 200 is an ion implanter described with 208 V, 3 phase, 50/60 Hz power and 35 kVa input.

    CategoryIon Implantation
  33. E 500 EHPIAgilent

    The Agilent / Varian E 500 EHPI is a medium current ion implanter for 8-inch wafers from 2003.

    CategoryIon Implantation
  34. VIISta 810Applied Materials

    Applied Materials / Varian VIISta 810 is a 12-inch medium current implanter.

    CategoryIon Implantation
  35. NV 8200 PAxcelis
    CategoryIon Implantation
  36. VIISta 900 XP IonApplied Materials
    CategoryIon Implantation
  37. Exceed 3000 AH Evo Ion ImplantNissin
    CategoryIon Implantation
  38. E 500 EHPI Medium CurrentVarian
    CategoryIon Implantation
  39. E 500 Medium CurrentVarian
    CategoryIon Implantation
  40. NV GSD A 80 IonAxcelis
    CategoryIon Implantation
  41. Kestrel 650Applied Materials
    CategoryIon Implantation
  42. Kestrel 650Varian
    CategoryIon Implantation
  43. Optima MD IonAxcelis
    CategoryIon Implantation
  44. E 500 High CurrentVarian

    The Varian E 500 High Current Implanter is a high-current ion implanter for 6-inch wafers.

    CategoryIon Implantation
  45. Optima HDx High CurrentAxcelis
    CategoryIon Implantation
  46. VIISta HCP+ High CurrentApplied Materials

    The Applied Materials Varian VIISta HCP+ is a high current ion implanter designed for 300 mm wafer processing.

    CategoryIon Implantation
  47. NV 10 SD 160 IonAxcelis
    CategoryIon Implantation
  48. E 220 HPVarian
    CategoryIon Implantation
  49. VHCPPLApplied Materials
    CategoryIon Implantation
  50. VHCPApplied Materials
    CategoryIon Implantation
  51. NV 8250Axcelis
    CategoryIon Implantation
  52. E 500 EHPI Ion ImplantVarian

    Varian E 500 EHPI Ion Implant System is a 6-inch wafer ion implant system with a Windows 7 control computer and V15.10.12 software.

    CategoryIon Implantation
  53. VIISta 80Applied Materials
    CategoryIon Implantation
  54. Exceed 2000 A IonNissin

    The Nissin Exceed 2000 A is an ion implanter for 8-inch wafers.

    CategoryIon Implantation
  55. GSD 200 EAxcelis
    CategoryIon Implantation
  56. E 1000Varian

    The Varian E1000 is an ion implanter manufactured by Varian.

    CategoryIon Implantation
  57. 80 XR Leap II IonApplied Materials
    CategoryIon Implantation
  58. Exceed 3000 AHNissin
    CategoryIon Implantation
  59. E 500 EHPAgilent
    CategoryIon Implantation
  60. Purion M IonAxcelis
    CategoryIon Implantation