Waferpedia

Comparison ledger

20 36 SurfaceversusDFL7340-stealth-dicer

Blanchard 20 36 Surface, Disco DFL7340-stealth-dicer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
20 36 SurfaceBlanchard
OEMBlanchardDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size—200mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlanchard 20 36 SurfaceDisco DFL7340-stealth-dicer
Specifications
ConfigurationWith new Elecro-Matic Neutrol II Magnetic Chuck Control[1]—
Magnetic Chuck ControlElectro-Matic Neutrol II[1]—
Typesurface grinder[1]—
Applicationdicing and grinding[2]—
Magnetic chuck controlElectro-Matic Neutrol II Magnetic Chuck Control[2]—
Condition notelow hours[1]—
OEM—Disco[3]
Model—DFL7340[3]
Process area—Packaging[3]
Compatible materials—Dedicated to dicing Si wafers only[3]
Laser engine wavelength—λ = 1342 nm[3]
Maximum sample diameter—200 mm[3]
Dicing orientation—Topside or backside (through tape) dicing possible[3]
Si resistivity requirement—ρ > 0.01 Ω•cm[3]
Surface roughness requirement—Dicing streets must be smooth (mirror polish) on the surface where the laser is incident[3]
Street clearance requirement—Wafer must be metal-free in a width 0.4 × substrate thickness, centred on the dicing street[3]

Plan your fab

Building a Dicing & Grinding process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca