Waferpedia

Disco

DFL7340-stealth-dicer

DFL7340-stealth-dicer — confluence.nanofab.ualberta.ca
Fig. 01DFL7340-stealth-dicerconfluence.nanofab.ualberta.ca[1]

Wafer size

200mm

Optics

λ = 1342 nm[1]

What is it?

The Disco DFL7340 stealth dicing system is listed as equipment in the Packaging process area and is available for dicing silicon wafers by staff. The source states that it is dedicated to Si wafers only, supports topside or backside (through tape) dicing, and has a maximum sample diameter of 200 mm.

What can it run?

Process applications and technology nodes documented for this tool.

  • Dicing silicon wafers

What do the numbers mean?

Wafer handling2

Compatible materials
Dedicated to dicing Si wafers only[1]
Accurate?
Street clearance requirement
Wafer must be metal-free in a width 0.4 × substrate thickness, centred on the dicing street[1]
Accurate?

Optics & imaging2

Laser engine wavelength
λ = 1342 nm[1]
Accurate?
Surface roughness requirement
Dicing streets must be smooth (mirror polish) on the surface where the laser is incident[1]
Accurate?

Configuration & options6

OEM
Disco[1]
Accurate?
Model
DFL7340[1]
Accurate?
Process area
Packaging[1]
Accurate?
Maximum sample diameter
200 mm[1]
Accurate?
Dicing orientation
Topside or backside (through tape) dicing possible[1]
Accurate?
Si resistivity requirement
ρ > 0.01 Ω•cm[1]
Accurate?
Interested in this tool?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What material is this dicer dedicated to?

It is dedicated to dicing silicon wafers only.[1]

What wafer size can it handle?

The maximum sample diameter is 200 mm.[1]

Can it dice from both sides of the wafer?

Yes. Topside dicing or backside dicing through tape is possible.[1]

What wafer surface condition is required at the dicing street?

The surface where the laser is incident must be smooth with a mirror-polish finish.[1]

What clearance is required in the dicing street?

The wafer must be metal-free in a width of 0.4 times the substrate thickness, centered on the dicing street.[1]

Not publicly documented

The following facts about the DFL7340-stealth-dicer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFL7340-stealth-dicer are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DFL7340-stealth-dicer are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DFL7340-stealth-dicer are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DFL7340-stealth-dicer are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DFL7340-stealth-dicer is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca
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Last updated Jul 29, 2026.

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