Comparison ledger
Blue M 0 500, Mattson SHS 2800 RTA, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 500Blue M | SHS 2800 RTAMattson |
|---|---|---|
| OEM | Blue M | Mattson |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 500 | Mattson SHS 2800 RTA |
| Specifications | ||
| Manufacturer | Blue M[1] | Mattson[4] |
| Model | 0 500[1] | SHS 2800[4] |
| Asset number | 139866[1] | — |
| Last confirm date | September 10, 2025[1] | — |
| Equipment type | Oven[1] | — |
| Configuration | — | Front End[2] |
| Process | — | Oxid (BPSG + RTP)[2] |
| Voltage | — | 380 V, 63.0 A, 50/60 Hz, 3 Phase[2] |
| Make | — | Mattson[2] |
| Category | — | Thermal / Diffusion[4] |
| Type | — | rapid thermal anneal system[4] |
| Temperature measurement | — | Ripple Pyrometer[2] |
| Cooling | — | Jet Venturi System[2] |
| Electrical | — | 380 V, 63.0 A, 50/60 Hz, 3 Phase[2] |
| Vintage | — | 2000[2] |
| Control configuration | — | Front End; tool-controller configurations[4] |
| Control software | — | Win7 (Updated 2018) / Win7 (Updated 2019)[4] |
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