Waferpedia

Comparison ledger

0 V 500versusLA 820

Blue M 0 V 500, SCREEN LA 820, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
LA 820SCREEN
OEMBlue MSCREEN
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 V 500SCREEN LA 820
Specifications
OEM—SCREEN / DNS[1]
Model—LA 820[1]
Product Category—RTP[2]
Wafer Size—6" / 8"[2]
Equipment Description—Rapid annealing[2]
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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]en.xinlisemi.comen.xinlisemi.com