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Comparison ledger

300 X Spinversus200 Spin

Brewer Science 300 X Spin, CEE 200 Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
300 X SpinBrewer Science
OEMBrewer ScienceCEE
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrewer Science 300 X SpinCEE 200
Specifications
P/N901445[1]—
ConfigurationHeavy Duty Drive[1]1 Phase[3]
Drive TypeHeavy Duty Drive[1]—
Voltage208-240 V[1]—
Part Number901445[1]—
Tool typeSpin coater[2]—
DriveHeavy duty drive[1]—
Power208-240 V operation[1]—
Model300 X[1]200[3]
OEMBrewer Science[1]—
Phase—1 Phase[3]
Type—Spin Coater[3]
Make—CEE[3]
Wafer Sizes—8 inch[3]
Equipment type—Spin Coater[3]
Spin speed—5000 rpm[4]
Substrate support—Flat substrates up to 200 mm or fragments[4]
Substrate thickness max—12 mm[4]
Coating thickness—Uniform coating thickness up to 100 µm[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]amolf.nlamolf.nl