Comparison ledger
Brooks 017-0024-01 Prealigner, KLA OP 5240 Film Thickness Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | |
|---|---|---|
| OEM | Brooks | KLA |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | KLA OP 5240 |
| Specifications | ||
| Configuration | — | Patterned, unpatterned[1] |
| Voltage | — | 230 V, 50/60 Hz[1] |
| Software Revision Level | — | TFMS Rev 4.1a32[1] |
| 1 Prealigner, Brooks, Model | — | PRE-201-CE[1] |
| 1 ATM-Robot, single EEF, Brooks, Model | — | ATM-105-1-DE (controller ESC-212)[1] |
| Manufacturer | — | KLA / Therma-wave[1] |
| Model | — | OP 5240[1] |
| Tool type | — | Film thickness measurement system[2] |
| Wafer sizes | — | 6 inch, 8 inch[1] |
| Process capability | — | Patterned, unpatterned[1] |
| Power | — | 230 V, 50/60 Hz[1] |
| Software revision | — | TFMS Rev 4.1a32[1] |
| Wafer handling | — | 1 ATM-Robot, single EEF, Brooks, Model ATM-105-1-DE (controller ESC-212)[2] |
| Accessories | — | Light-Pen; VGA Monitor (Main Application); TFT (video)[1] |
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