KLA

OP 5240 Film Thickness Measurement

Lithography KLA OP 5240 family

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OP 5240 Film Thickness Measurement — Inventory photo — Fig. 01OP 5240 Film Thickness MeasurementInventory photo^[1]

What it is

The KLA / Therma-wave OP 5240 is a film thickness measurement system.^[1]^[4]

The identified model is OP 5240 from KLA / Therma-wave.^[1]^[4]

What do the numbers mean?

Power & electrical1

Voltage: 230 V, 50/60 Hz^[1]

Wafer handling1

1 ATM-Robot, single EEF, Brooks, Model: ATM-105-1-DE (controller ESC-212)^[1]

Control & software1

Software Revision Level: TFMS Rev 4.1a32^[1]

Configuration & options8

Patterned, unpatterned^[1]; 1 Mess stage^[1]
1 Prealigner, Brooks, Model: PRE-201-CE^[1]; 2 Loadport Stations^[1]; Accessories:^[1]; Light-Pen^[1]; VGA Monitor (Main Application)^[1]; TFT (video)^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Voltage230 V, 50/60 Hz^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the KLA / Therma-wave OP 5240?

It is a film thickness measurement system.^[1]^[4]

What model designation is given for this equipment?

The model designation is OP 5240.^[1]^[4]

Not publicly documented

The following facts about the OP 5240 Film Thickness Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the OP 5240 Film Thickness Measurement are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the OP 5240 Film Thickness Measurement are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the OP 5240 Film Thickness Measurement are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the OP 5240 Film Thickness Measurement are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the OP 5240 Film Thickness Measurement is not on record.
Answerable by: an OEM datasheet or a fab qualification report